FABRICATION AND VIBRATION ANALYSIS ON PIEZOELECTRIC MATERIAL

Abstract

The analysis of commercially available piezoelectric coefficient monocrystalline materials such as PMN-PT (lead magnesium niobate - lead titanate) helps broaden the gate for silicon-integrated applications (PiezoMEMS) becoming more compatible with micro technology batch processes, further advances are expected in terms of miniaturization, optimization, functionality or integration with electronics. Subsequently, operating voltage will be lower and devices response time will improve dramatically. Fabrication of the piezoelectric materials has been performed and vibration analysis has been carried out.