PARAMETRIC ANALYSIS ON THE DESIGN OF RF MEMS SERIES SWITCHES

  • Julio A. Lonac MicroLAB-RF-microwave and MEMS research center of the Universidad Nacional de San Martín, ECyT-UNSAM, Argentina
  • Gustavo A. Merletti MicroLAB-RF-microwave and MEMS research center of the Universidad Nacional de San Martín, ECyT-UNSAM, Argentina

Abstract

A parametric analysis on the design of RF MEMS series switches is performed. The main design variables were identified and a set of RF MEMS series switches were designed, fabricated and measured. The effect of these design variables on the pull-in voltage (Vp) and the RF performance of the switches is studied and simplified equations for design propose are evaluated and corrected on the basis of experimental results.

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Published
2015-12-07
How to Cite
Lonac, J. A., & Merletti, G. A. (2015). PARAMETRIC ANALYSIS ON THE DESIGN OF RF MEMS SERIES SWITCHES. European Scientific Journal, ESJ, 11(10). Retrieved from https://eujournal.org/index.php/esj/article/view/6694
Issue
ESJ DECEMBER 2015 /SPECIAL/ EDITION VOL.1
Section
Articles